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Technology Disclosure: Technology Disclosure: 05-037 A General Method to Increase the Sensitivity and Spectral Resolution of Micro-Electro-Mechanical Accelerometers

Background

Present generation micro-electro-mechanical (MEMS) or micro-electro-optical-mechanical (MEOMS) accelerometers exhibit low signal strength, high inherent noise and poor broadband spectral response. These inherent drawbacks have limited the commercial applications of these systems.

Summary

Researchers at the University of Wyoming’s Mechanical Engineering Department have developed a general method to increase the sensitivity and spectral resolution of micro-electro-mechanical accelerometers. This innovative device is based upon an exceptional high quality factor (Q) position feedback controlled mechanical resonator. The high Q device is operated under position feedback control and exactly at peak resonant frequency. Using a unique process, acoustic waves, incident to the sensing surface or device’s frame, cause periodic accelerations of the resonant device frame (perturbations). Subsequently, these perturbations disrupt the natural position resonance of the system. In essence, perturbations acting on the device’s frame extract energy from the vibrating system such that the motion of the system differs from the specified control input signal. To null the position error, the feedback control system generates a large and measurable signal; the signal is then analyzed by extracting the time dependent spectral content in order to identify the source of the acoustic waves or perturbations. It is possible that the use of multiple sensors arranged at different angles may effectively identify the direction and origination of surface acoustic waves.

Applications

The present device can be applied to virtually any application that requires the detection and/or monitoring of surface acoustic waves or disturbances; and, most notably in commercial applications where comparable alternatives exhibit low signal sensitivity, high inherent noise and poor broadband spectral response. Specific commercial applications include areas such as automotive airbag accelerometers, micro-seismic personnel and vehicle detection sensors, sensors for active earthquake mitigation systems, sensors for vehicle active suspensions, and sensors for monitoring civil infrastructure such as signs, roads and bridges. Researchers feel that this technology has limitless potential and application in many technology sectors and most notably in those previously listed.

The University of Wyoming has filed a provisional patent application on this invention. If you would like to learn more about this novel method to increase the sensitivity and spectral resolution for micro-electro-mechanical accelerometers or how your company can assist in its continued development, or even license the technology for commercial use feel free to contact Davona Douglass. We would be happy to discuss this opportunity with you further and provide you with more detailed information.